Electron/Ion Beam Systems

North Star has pioneered an exciting new electron beam/ion beam technology: the Nested High Voltage Generator (NHVG). The NHVG reduces the cost and size of high voltage DC accelerators while providing the advantages of solid-state drive.

Our proprietary NHVG technology uses oil/plastic insulation in an arrangement of nested Faraday cages. Beams are produced without the requirement for sulfur hexafluoride insulation, or any other pressurized gas.

For example, North Star NHVG systems are capable of producing ion beams in excess of 3MV and 10 mA from direct ion sources, and high energies via the tandem technology.

Our accelerators can be used in dedicated processing facilities or in-line. Applications for this technology include plastics processing, surface analysis and modification, medical sterilization and X-ray imaging.

High Energy Ion Implanters > 400 kV
North Star's Nested High Voltage Generator (NHVG)-based implantation systems are reliable, small, light weight, easily installed and easily moved in a fab or laboratory environment.
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Plasma Implantation Plasma Source
North Star has developed high density pulsed RF ion sources and high current, short pulse modulators which are uniquely suited to the high plasma and current densities required by conformal implantation.
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Plasma Source Power Supply PPS-40
North Star's Plasma Source Power Supply PPS-40 produces on-demand, large volume plasma densities in excess of 1011/cc over 1 m3 for plasma ion implantation applications.
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